REMRSEC Facility Use Fees Begin July 1st


University based research education and technical support provided by REMRSEC facilities will continue to support the CASE vision: “To capitalize on our cross-disciplinary strengths in science and engineering as we develop future leaders capable of addressing significant scientific and technological issues that challenge our world.”

It is now necessary to transition the facilities to fee structure which will begin July 1, 2017.

The goals of this new user fee system are:

• To maintain a safe research environment for REMRSEC facilities

• To enable and monitor access to all REMRSEC facilities

• To provide REMRSEC facilities for CSM lab based curriculum and other education activities

• To continue to provide REMRSEC operational and equipment support to CSM researchers

• To support the REMRSEC student worker program

The fee structure below shows monthly fees for chemical synthesis lab HH323, the cleanroom and a standard suite of processing and characterization equipment. Nominal per run fees are assigned to the sputter system, evaporator and furnaces. Hourly fees are assigned to the ESR, PL, solar simulator, and for technical assistance. For the plasma enhanced CVD and nanoparticle growth lab in HH302, the user fee will be negotiated depending on the project’s needs, equipment adaptions and would be best done at the proposal stage. This is to help tailor specialized equipment to the specific needs of the PI and to provide access without a significant barrier to use.

PIs with grants in REMRSEC may leverage IDC return. Normal distribution is 50% held by the center and 50% returned to the PI. Of the 50% held by the center, up to $1,125.00 per year can be leveraged for REMRSEC fees.

The rates below are for internal Mines users only. External inquiries are welcome. Please contact with details on your project.



The REMRSEC has facilities estimated at $7M, which leveraged University contributed remodeling costs of $3.6M. The REMRSEC has helped to bring in $32M to CSM since 2008 and has established a broad range of capabilities ranging from thin film synthesis to processing to characterization within five laboratories. Many departments at CSM rely on the REMRSEC facilities including Physics, Metallurgical and Materials Engineering, Chemical and Biological Engineering, Electrical Engineering and Computer Science, Petroleum Engineering, Chemistry and Mechanical Engineering. The REMRSEC works collaboratively to meet center members’ needs and to provide access and training to the CSM community to advance their research goals. Moreover, the REMRSEC facilitates CSM educational curriculum in microelectronics processing (PHGN/CHEN 435 & CHEN/PHGN/MLGN 535) as well as hands on research education for senior design, field session and REU participants.

The diversity of REMRSEC owes to its ability to meet the demands of interdisciplinary research and to respond quickly to new opportunities. However, these same attributes drive the need for a hybrid facility fee structure. This structure takes advice from other Mines centers but is as unique as it is new. Hence, hourly, run and monthly fees are designated for each laboratory or stand alone equipment according to their typical use.





Plasma Enhanced Chemical Vapor Deposition System (PECVD)

  • PECVD system is used for the synthesis of nano-crystalline Si (Si quantum dots in a-Si matrix, a-Si and Si nanoparticles.
  • Other precursor gases can be used to embed Si nanoparticles in a different matrix (e.g. Si3N4).

RF/DC Sputtering Systems

  • ATC Orion4 RF/DC sputtering systems (used for sputtering ITO contacts)
  • DC sputtering system equipped with a load lock


Wet and Dry Glove Boxes

  • Two glove boxes with O2 and moisture levels less than 1 ppm .
  • Wet glove box is plumbed with dry organic solvents toluene, acetonitrile, chloroform 8 fume hoods provide plenty of room for synthesis.

CLass 1000 Clean Room

  • Photolithography
  • Diffusion Doping
  • Oxidation
  • Thermal Treatments
  • Sputter & Evaporator
  • Process Optimization

Additional Synthesis Tools

  • Thermal evaporators to deposit Au, Cu, Al, Ag, Ti (e.g. used for making contacts on thin film transistors).
  • Multiple furnaces capable of running in vacuum or gas environments.



PL is used to characterize the photo degradation effects in nanocrystalline Si

  • UV and IR
  • Sample cooling available down to 20 K

Electron Paramagnetic Resonance (EPR)

EPR is routinely used to study and quantify defects in nanocrystalline materials.

  • X-band EPR
  • Sample cavity can be cooled from RT to 25 K

Probe Station and Solar Simulator

  • C-V and I-V curves
  • I-V with 0.1 fA resolution and 1 A full range
  • Quantum efficiency measurements


K. Xerxes Steirer